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US 2022/0178759 A1Published application
Thermistor element and electromagnetic wave sensor
AssigneeTDK Corporation
InventorsMaiko SHIROKAWA, Shinji HARA, Naoki OHTA, Susumu AOKI, Eiji KOMURA
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Abstract
A thermistor element includes a thermistor film, a first electrode provided in contact with one surface of the thermistor film, and a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein the thermistor film includes an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction.
Claims3
A thermistor element comprising:
- a thermistor film;
- a first electrode provided in contact with one surface of the thermistor film;
- and
- a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein
- the thermistor film comprises an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction.
2 more elements
Dependencies are inferred from the claim text.