Electromagnetic wave sensor
AssigneeTDK Corporation
InventorsShinji HARA, Naoki OHTA, Susumu AOKI, Eiji KOMURA, Maiko SHIROKAWA
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AssigneeTDK Corporation
InventorsShinji HARA, Naoki OHTA, Susumu AOKI, Eiji KOMURA, Maiko SHIROKAWA
Estimating the term…
An electromagnetic wave sensor includes a substrate having transmittance of electromagnetic waves having a specific wavelength, an insulator layer provided on one surface side of the substrate, a thermistor film disposed to have a space between the thermistor film and one surface of the substrate, and a wiring part provided inside or on a surface of the insulator layer and electrically connected to the thermistor film, wherein a transmittance of the electromagnetic waves at a portion facing the thermistor film is relatively higher than a transmittance of the electromagnetic waves at a portion where the wiring part is provided in a layer in which the insulator layer is provided.
An electromagnetic wave sensor comprising:
An electromagnetic wave sensor comprising:
Dependencies are inferred from the claim text.