Piezoelectric frequency-modulated gyroscope

A gyroscope comprising a proof mass aligned on a lateral axis and on a transversal axis which is orthogonal to the lateral axis, wherein the lateral and transversal axes define a device plane,

• wherein the gyroscope further comprises a first transduction/suspension structure which is coupled to the proof mass with a laterally flexible first coupling spring from a first coupling direction, a second transduction/suspension structure which is coupled to the proof mass with a laterally flexible second coupling spring from a second coupling direction, a third transduction/suspension structure which is coupled to the proof mass with a transversally flexible third coupling spring from a third coupling direction, and a fourth transduction/suspension structure which is coupled to the proof mass with a transversally flexible fourth coupling spring from a fourth coupling direction, wherein the first and second coupling directions are substantially opposite to each other, the third and fourth coupling directions are substantially opposite to each other, and the first and second coupling directions are substantially perpendicular to the third and fourth coupling directions,
• and the first transduction/suspension structure comprises one or more first lateral elongated beams which extend from corresponding one or more anchor points in a first lateral direction, the second transduction/suspension structure comprises one or more second lateral elongated beams which extend from corresponding one or more anchor points in a second lateral direction, wherein the second lateral direction is opposite to the first,
• and the third transduction/suspension structure comprises one or more first transversal elongated beams which extend from corresponding one or more anchor points in a first transversal direction, and the fourth transduction/suspension structure comprises one or more second transversal elongated beams which extend from corresponding one or more anchor points in a second transversal direction, wherein the second transversal direction is opposite to the first,
• and the first and second transduction/suspension structures further comprise one or more lateral piezoelectric transducers which have been deposited on the one or more first or second lateral elongated beams, and the third and fourth transduction / suspension structures further comprise one or more transversal piezoelectric transducers which have been deposited on the one or more first or second transversal elongated beams,
• wherein said one or more lateral piezoelectric transducers are configured to bend the corresponding lateral elongated beams in the device plane and to measure the bending of the corresponding lateral elongated beams in the device plane and said one or more transversal piezoelectric transducers are configured to bend the corresponding transversal elongated beams in the device plane and to measure the bending of the corresponding transversal elongated beams in the device plane.