Angular velocity sensor

An angular velocity sensor, comprising:

• a substrate;
• and
• a structural component provided at a side of a principal surface of the substrate,
• the structural component including
• a weight member having an outer peripheral shape which is a polygonal shape in plan view in a thickness direction defined with respect to the substrate,
• a pair of frame-shaped members located on one side and the other side of the weight member in a prescribed direction orthogonal to the thickness direction defined with respect to the substrate, the pair of frame-shaped members being displaceable in the prescribed direction,
• a pair of first elastic members each of which connects the weight member to a corresponding one of the pair of frame-shaped members and is elastically deformable in a direction orthogonal to the thickness direction defined with respect to the substrate and the prescribed direction,
• a pair of anchor members each of which supports the corresponding one of the pair of frame-shaped members and is fixed to the substrate,
• a pair of first input electrodes corresponding to the pair of frame-shaped members on a one-to-one basis, each of the pair of first input electrodes being located on an outer side of a corresponding one of the frame-shaped members and being fixed to the substrate,
• a pair of second input electrodes including electrode portions corresponding to the pair of frame-shaped members on a one-to-one basis, each of the electrode portions being located on the outer side of the corresponding one of the frame-shaped members and being connected to the corresponding one of the frame-shaped members, each of the pair of second input electrodes facing a corresponding one of the first input electrodes and being displaceable in the prescribed direction,
• a pair of first reference electrodes corresponding to the pair of frame-shaped members on a one-to-one basis, each of the pair of first reference electrodes being located on an inner side of a corresponding one of the frame-shaped members and being fixed to the substrate, and
• a pair of second reference electrodes including electrode portions corresponding to the pair of frame-shaped members on a one-to-one basis, each of the electrode portions being located on the inner side of the corresponding one of the frame-shaped members and being connected to the corresponding one of the frame-shaped members, the pair of second reference electrodes facing the pair of first reference electrodes and being displaceable in the prescribed direction,
• in the structural component, each of the first input electrodes and a corresponding one of the electrode portions of the second input electrodes being located between the weight member and the corresponding one of the pair of frame-shaped members in the prescribed direction in plan view in the thickness direction defined with respect to the substrate.