Vibrator Device, Electronic Apparatus, And Vehicle
AssigneeSeiko Epson Corporation
InventorsRyuta NISHIZAWA, Seiichiro OGURA, Keiichi YAMAGUCHI
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AssigneeSeiko Epson Corporation
InventorsRyuta NISHIZAWA, Seiichiro OGURA, Keiichi YAMAGUCHI
Estimating the term…
Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.
A vibrator device comprising:
Dependencies are inferred from the claim text.