Synchronized four mass gyroscope
AssigneeMurata Manufacturing Co., Ltd.
InventorVille KAAJAKARI
Life of this patent
Estimating the term…
Abstract
A gyroscope which comprises first and second proof masses aligned on a first lateral axis, third and fourth proof masses are aligned on a second lateral axis, and central and peripheral anti-phase coupling structures which synchronize a first and a second oscillation mode in this four-mass system. Each central x-axis anti-phase structure and each central y-axis anti-phase structure comprises an in-plane seesaw with a central elongated bar which is suspended from at least one central anchor point with at least one central seesaw suspender which allows the central elongated bar to rotate in the device plane about an axis which is perpendicular to the device plane.
Claims5
A gyroscope which comprises a device plane where a first and a second lateral axis cross a first and a second transversal axis orthogonally, and the gyroscope also comprises first, second, third and fourth proof masses, wherein the first and second proof masses are aligned on the first lateral axis, the third and fourth proof masses are aligned on the second lateral axis, the first and third proof masses are aligned on the first transversal axis and the second and fourth proof masses are aligned on the second transversal axis,
- and the first and second proof masses are coupled to each other with a first central x-axis anti-phase coupling structure which flexibly allows the simultaneous movement of the first and second proof masses in opposite lateral directions but rigidly resists the simultaneous movement of the first and second proof masses in the same lateral direction,
- and the third and fourth proof masses are coupled to each other with a second central x-axis anti-phase coupling structure which flexibly allows the simultaneous movement of the third and fourth proof masses in opposite lateral directions but rigidly resists the simultaneous movement of the third and fourth proof masses in the same lateral direction,
- and the first and third proof masses are coupled to each other with a first central y-axis anti-phase coupling structure which flexibly allows the simultaneous movement of the first and third proof masses in opposite transversal directions but rigidly resists the simultaneous movement of the first and third proof masses in the same transversal direction,
- and the second and fourth proof masses are coupled to each other with a second central y-axis anti-phase coupling structure which flexibly allows the simultaneous movement of the second and fourth proof masses in opposite transversal directions but rigidly resists the simultaneous movement of the second and fourth proof masses in the same transversal direction,
- and the first and second proof masses are coupled to each other with a first peripheral y-axis anti-phase coupling structure which flexibly allows simultaneous movement of the first and second proof masses in opposite transversal directions but rigidly resists the simultaneous movement of the first and second proof masses in the same transversal direction,
- and the third and fourth proof masses are coupled to each other with a second peripheral y-axis anti-phase coupling structure which flexibly allows simultaneous movement of the third and fourth proof masses in opposite transversal directions but rigidly resists the simultaneous movement of the third and fourth proof masses in the same transversal direction,
- and the first and third proof masses are coupled to each other with a first peripheral x-axis anti-phase coupling structure which flexibly allows simultaneous movement of the first and third proof masses in opposite lateral directions but rigidly resists the simultaneous movement of the first and third proof masses in the same lateral direction,
- and the second and fourth proof masses are coupled to each other with a second peripheral x-axis anti-phase coupling structure which flexibly allows simultaneous movement of the second and fourth proof masses in opposite lateral directions, but rigidly resists the simultaneous movement of the second and fourth proof masses in the same lateral direction,
- and the gyroscope further comprises a set of first anchor points adjacent to the first proof mass, a set of second anchor points adjacent to the second proof mass, a set of third anchor points adjacent to the third proof mass and a set of fourth anchor points adjacent to the fourth proof mass, and each of the first, second, third and fourth proof masses is suspended from the corresponding set of first, second, third and fourth anchor points by one or more suspension structures,
- wherein each central and peripheral x-axis anti-phase coupling structure is coupled to the corresponding proof masses with an x-axis coupling element which is flexible in the transversal direction and stiff in the lateral direction, and each central and peripheral y-axis anti-phase coupling structure is coupled to the corresponding proof masses with a y-axis coupling element which is flexible in the lateral direction and stiff in the transversal direction,
- and wherein each central x-axis anti-phase structure and each central y-axis anti-phase structure comprises an in-plane seesaw with a central elongated bar which is suspended from at least one central anchor point with at least one central seesaw suspender which allows the central elongated bar to rotate in the device plane about an axis which is perpendicular to the device plane.
Dependencies are inferred from the claim text.