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US 2022/0178533 A1Published application
Light source device, cooling method, and manufacturing method for product
AssigneeCanon Kabushiki Kaisha
InventorsTakao Miura, Kazuyuki Kasumi
Life of this patent
Estimating the term…
Abstract
An LED light source module includes a circuit board, solid-state light emitting elements arranged on the circuit board, a heatsink disposed in contact with the circuit board and having a channel formed inside, through which refrigerant flows, and a switching unit configured to switch a flow direction of refrigerant through the channel to an opposite direction.
Claims25
A device comprising:
- a circuit board;
- a plurality of light emitting elements (LEDs) disposed on the circuit board;
- and
- a heatsink configured to cool the plurality of LEDs, wherein
- a flow direction of refrigerant through a channel in the heatsink is switchable between a first direction and a second direction opposite to the first direction.
2 more elements
A method comprising:
- first cooling flowing refrigerant in a first direction through a channel in a heatsink that cools a cooling target;
- controlling switching a flow direction of the refrigerant through the channel to a second direction opposite to the first direction;
- and
- second cooling flowing the refrigerant in the second direction through the channel.
1 more element
An apparatus comprising:
- a device including a circuit board, a plurality of light emitting elements (LEDs) disposed on the circuit board, and a heatsink configured to cool the plurality of LEDs, wherein a flow direction of refrigerant through a channel in the heatsink is switchable between a first direction and a second direction opposite to the first direction;
- a lens;
- and
- an integrator,
- wherein a light intensity distribution from each of the plurality of LEDs disposed on the circuit board is overlaid on an incident plane of the integrator via the lens.
2 more elements
An apparatus comprising:
- a light source device including a circuit board, a plurality of light emitting elements (LEDs) disposed on the circuit board, and a heatsink configured to cool the plurality of LEDs, wherein a flow direction of refrigerant through a channel in the heatsink is switchable between a first direction and a second direction opposite to the first direction;
- a lens;
- and
- an integrator,
- wherein a mask is illuminated by light from an illumination apparatus in which a light intensity distribution from each of the plurality of LEDs disposed on the circuit board is overlaid on an incident plane of the integrator via the lens, and
- wherein a pattern of the mask is exposed to the circuit board.
3 more elements
A method for exposing a pattern of a mask to a circuit board by irradiating the mask with illumination light illuminated from a light source while the light source is being cooled, the method comprising:
- first exposing a pattern of a mask to a circuit board with the illumination light while flowing refrigerant in a first direction through a channel in a heatsink that cools the light source;
- switching a flow direction of the refrigerant through the channel to a second direction opposite to the first direction;
- and
- second exposing a pattern of a mask to the circuit board with the illumination light while flowing the refrigerant in the second direction through the channel.
1 more element
An apparatus that irradiates light to an irradiated object, the apparatus comprising:
- a device including a circuit board, a plurality of light emitting elements (LEDs) disposed on the circuit board, and a heatsink configured to cool the plurality of LEDs, wherein
- a flow direction of refrigerant through a channel in the heatsink is switchable between a first direction and a second direction opposite to the first direction, and
- the light performs at least one of a sterilization treatment and a surface treatment on the irradiated object.
A method comprising:
- exposing a pattern of a mask to a circuit board by irradiating the mask with illumination light illuminated from a light source while cooling the light source;
- and
- developing the circuit board, wherein
- a product is manufactured from the developed circuit board,
- the exposing includes
- exposing a pattern of a mask to the circuit board with the illumination light while flowing refrigerant in a first direction through a channel in a heatsink that cools the light source,
- switching a flow direction of the refrigerant through the channel to a second direction opposite to the first direction, and
- exposing a pattern of a mask to the circuit board with the illumination light while flowing the refrigerant in the second direction through the channel.
5 more elements
Dependencies are inferred from the claim text.