Sealing member and apparatus for treating substrate
AssigneeSemes Co., Ltd.
InventorsSEUNG HOON OH, SANG MIN LEE, JONG DOO LEE, JIN MO JAE, YOUNG HUN LEE
Life of this patent
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Abstract
A sealing member for use in sealing a chamber for treating a substrate, the sealing member inserted in a groove formed in the chamber, includes a bottom part, a top part opposite the bottom part, an inner part connecting a first side of the bottom part to the top part, an outer part opposite the inner part and connecting a second side of the bottom part to the top part, and a recessed portion between the top part and the outer part.
Claims20
A sealing member for use in sealing a chamber for treating a substrate, the sealing member inserted in a groove formed in the chamber, and the sealing member comprising:
- a bottom part;
- a top part opposite the bottom part;
- an inner part connecting a first side of the bottom part to the top part;
- an outer part opposite the inner part and connecting a second side of the bottom part to the top part;
- and
- a recessed portion between the top part and the outer part.
A substrate treating apparatus comprising:
- a first body;
- a second body combining with the first body to form a treating space for treating a substrate;
- a moving member moving at least one of the first body and the second body;
- and
- a sealing member inserted in a groove at the first body or the second body,
- wherein the sealing member when seen from a cross-section of the sealing member comprises:
- a bottom part;
- a top part;
- an inner part formed between the bottom part and the top part and positioned adjacent to the treating space;
- and
- an outer part formed between the bottom part and the top part and positioned further away from the treating space than the inner part, and
- wherein a surface of the outer part has an inclined shape with respect to a bottom surface of the groove and is polished to have a surface roughness that is lower than a surface roughness of each of the other parts of the sealing member.
A substrate treating apparatus, using a supercritical fluid to treat a substrate, comprising:
- a top body;
- a bottom body combining with the top body to form a treating space for treating the substrate;
- a moving member moving the bottom body upwardly or downwardly;
- and
- a sealing member inserted in a groove formed at the bottom body,
- wherein the sealing member comprises:
- a bottom part;
- a top part;
- an inner part connecting a first side of the bottom part to the top part;
- an outer part opposite the inner part and connecting a second side of the bottom part to the top part, and having an inclined shape with respect to a bottom surface of the groove;
- and
- a recessed portion between the outer part and the top part,
- wherein the groove comprises:
- the bottom surface on which the bottom part is placed;
- an inner surface facing a surface of the inner part;
- and
- an outer surface facing a surface of the outer part, and
- wherein the outer surface is polished to have a surface roughness lower than a surface roughness of each of the bottom part, the top part, and the inner part.
Dependencies are inferred from the claim text.