Fluid control device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKenjiro OKAGUCHI, Nobuhira TANAKA
Life of this patent
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Abstract
A fluid control device includes a piezoelectric pump having a piezoelectric element, a driving circuit that receives a driving power supply voltage applied thereto and drives the piezoelectric element, and a startup circuit disposed between the driving circuit and an input terminal for a power supply voltage. The startup circuit increases the driving power supply voltage to a voltage (V1) lower than a constant voltage (Vc) in a first stage (P1) after startup, maintains or decreases the driving power supply voltage in a second stage (P2) following the first stage (P1), and increases the driving power supply voltage to the constant voltage (Vc) in a third stage (P3) following the second stage (P2).
Claims12
A fluid control device comprising:
- a piezoelectric pump that includes a pump chamber having a piezoelectric element and a valve chamber communicating with the pump chamber and having a valve, a pump chamber opening which allows the pump chamber to communicate with an outside-pump-chamber space and a valve chamber opening which allows the valve chamber to communicate with an outside-valve-chamber space;
- a driving circuit that receives a driving power supply voltage applied thereto and drives the piezoelectric element;
- and
- a drive control circuit that is connected between the driving circuit and an input terminal for the driving power supply voltage and outputs the driving power supply voltage to the driving circuit, wherein
- the drive control circuit adjusts the driving power supply voltage or a driving current corresponding to the driving power supply voltage in accordance with a differential pressure between the outside-pump-chamber space and the outside-valve-chamber space or in accordance with a time elapsed from a supply start time of the driving power supply voltage.
Dependencies are inferred from the claim text.