US 2022/0177717 A1 · CONTACT STRUCTURE, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING CONTACT STRUCTURE

Abstract

A contact structure is provided, which includes a substrate, a copper layer, an organic composite protective layer, and a nanosilver layer. The copper layer is disposed over the substrate. The organic composite protective layer is disposed over the copper layer to avoid oxidation of the copper layer, in which the organic composite protective layer forms a monomolecular adsorption layer over a surface of the copper layer. The nanosilver layer is disposed over the organic composite protective layer. A method of manufacturing a contact structure is also provided.

Claims20

Dependent claims

A contact structure, comprising:

a substrate;
a copper layer disposed over the substrate;
an organic composite protective layer disposed over the copper layer to mitigate oxidation of the copper layer, wherein the organic composite protective layer forms a monomolecular adsorption layer over a surface of the copper layer;
and
a nanosilver layer disposed over the organic composite protective layer.

2 more elements

A method of manufacturing a contact structure, comprising:

providing a copper layer disposed over a substrate;
coating a protective layer solution on the copper layer, the protective layer solution comprising:
an organic protective composition, present in an amount of from about 0.1 to about 10 percent by weight of the protective layer solution;
organic alcohols, present in an amount of from about 0.1 to about 10 percent by weight of the protective layer solution;
and
water, present in an amount of from about 10 to about 90 percent by weight of the protective layer solution;
forming an organic composite protective layer from the protective layer solution;
and
disposing a nanosilver layer over the organic composite protective layer.

6 more elements

Dependencies are inferred from the claim text.

Contact structure, electronic device, and method of manufacturing contact structure

Life of this patent

Contact structure, electronic device, and method of manufacturing contact structure

Life of this patent

Abstract

Claims20