Crosslinkable siloxane compounds for the preparation of dielectric materials

Abstract

The present invention relates to novel siloxane oligomer and polymers and crosslinkable compositions, which may be used for the preparation of dielectric materials having excellent barrier, passivation and/or planarization properties. There is also provided a monomer composition from which the siloxane oligomers or polymers may be obtained and a method for preparing said siloxane oligomers or polymers. Beyond that, the present invention relates to a manufacturing method for preparing a microelectronic structure, wherein a crosslinkable composition is applied to a surface of a substrate and then cured, and to an electronic device comprising a microelectronic structure which is obtained by said manufacturing method.

Dependencies are inferred from the claim text.