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US 2022/0177377 A1Published application
Silicon nitride substrate, silicon nitride-metal composite, silicon nitride circuit board, and semiconductor package
AssigneeDenka Company Limited
InventorsYuta TSUGAWA, Seiji KOBASHI, Koji NISHIMURA
Life of this patent
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Abstract
A silicon nitride substrate includes silicon nitride and magnesium, in which when a surface of the silicon nitride substrate is analyzed with an X-ray fluorescence spectrometer under the specific Condition I, XB/XA is 0.8 or more and 1.0 or less.
Claims7
A silicon nitride substrate comprising silicon nitride and magnesium,
- wherein when a surface of the silicon nitride substrate is analyzed with an X-ray fluorescence spectrometer under the following Condition I, XB/XA is 0.80 or more and 1.00 or less,
- (Condition I)
- an amount of magnesium (% by mass, in terms of oxide) at an intersection A of diagonals on any one surface of the silicon nitride substrate is defined as XA (%), the amount of magnesium obtained by analyzing the intersection A with the X-ray fluorescence spectrometer, and an arithmetic mean value of amounts of magnesium (% by mass, in terms of oxide) at four points of B1, B2, B3, and B4 which are on the diagonals and positioned 3 mm inward from corners of the silicon nitride substrate to a direction of the intersection A is defined as XB (%), the arithmetic mean value of the amounts of magnesium obtained by analyzing the four points B1, B2, B3, and B4 with the X-ray fluorescence spectrometer.
Dependencies are inferred from the claim text.