Mems device with electrodes and a dielectric
AssigneeKnowles Electronics, LLC
InventorsPeter V. Loeppert, Michael Pedersen
Life of this patent
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Abstract
A first electrode of a MEMS device can be oriented lengthwise along and parallel to an axis, and can have a first end and a second end. A second electrode can be oriented lengthwise along and parallel to the axis and can have a first end and a second end. A third electrode can be oriented lengthwise along and parallel to the axis and can have a first end and a second end. The first, second, and third electrodes can each be located at least partially within an aperture of a plurality of apertures of a solid dielectric that can surround the second electrode second end and the third electrode first end. The second electrode first end and the third electrode second end can be located outside of the solid dielectric.
Claims24
A microelectromechanical systems (MEMS) device comprising:
- a first electrode oriented lengthwise along and parallel to an axis, the first electrode having a first end and a second end;
- a second electrode oriented lengthwise along and parallel to the axis, the second electrode having a first end and a second end;
- a third electrode oriented lengthwise along and parallel to the axis, the third electrode having a first end and a second end;
- and
- a solid dielectric including a plurality of apertures,
- wherein the first, second, and third electrodes are each located at least partially within an aperture of the plurality of apertures,
- wherein the dielectric surrounds the second end of the second electrode and the first end of the third electrode, and
- wherein the first end of the second electrode and the second end of the third electrode are located outside of the solid dielectric.
A microelectromechanical systems (MEMS) device comprising:
- a solid dielectric, the dielectric having a first outer surface and a second outer surface opposite the first outer surface, the dielectric having a plurality of passages, each of the plurality of passages having an opening on the first outer surface and an opening on the second outer surface;
- and
- an electrode set comprising:
- a first electrode partially disposed within a first passage of the plurality of passages such that a first end of the first electrode extends beyond the first outer surface and a second end of the first electrode extends beyond the second outer surface;
- a second electrode partially disposed within a second passage of the plurality of passages such that a first end of the second electrode extends beyond the first outer surface and a second end of the second electrode is within the second passage;
- and
- a third electrode partially disposed within a third passage of the plurality of passages such that a first end of the third electrode is within the third passage and a second end of the third electrode extends beyond the second outer surface,
- wherein the first, second, and third electrodes are fixed relative to one another, and
- wherein the dielectric and electrode set are movable relative to each other.
Dependencies are inferred from the claim text.