Method of manufacturing liquid jet head chip, liquid jet head chip, liquid jet head, and liquid jet recording device
AssigneeSii Printek Inc.
InventorHitoshi NAKAYAMA
Life of this patent
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Abstract
The trouble of removing a protective film such as a poly-paraxylene film from the part not requiring the protective film is reduced. A method of manufacturing a head chip according to an aspect of the present disclosure includes a substrate preparation step of preparing an actuator plate substrate having a jet channel communicated with a nozzle hole configured to jet ink, and a non-jet channel which does not jet the ink, and a protective film formation step of forming a protective film configured to protect a common electrode formed on an inner surface of the jet channel from the ink in a state in which the jet channel is exposed and the non-jet channel is covered after the substrate preparation step.
Claims12
A method of manufacturing a liquid jet head chip, comprising:
- a substrate preparation step of preparing an actuator plate substrate having a jet channel communicated with a nozzle hole configured to jet liquid, and a non-jet channel which does not jet the liquid;
- and
- a protective film formation step of forming a protective film configured to protect an electrode formed on an inner surface of the jet channel from the liquid in a state in which the jet channel is exposed and the non jet channel is covered, after the substrate preparation step.
A liquid jet head chip comprising:
- an actuator plate having a jet channel communicated with a nozzle hole configured to jet liquid, and a non-jet channel which does not jet the liquid, wherein
- the actuator plate has a protective film configured to protect an electrode formed on an inner surface of the jet channel from the liquid, and
- the protective film fulfills either one of
- (A) the protective film is not provided to the non jet channel, and
- (B) the protective film is provided to the non jet channel, and a thickness of the protective film in the non jet channel is smaller than a thickness of the protective film in the jet channel.
Dependencies are inferred from the claim text.