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US 2022/0176515 A1Published application
Force measurement system
AssigneeChangxin Memory Technologies, Inc.
InventorZhengxian ZHANG
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Abstract
Force measurement system is provided. It includes: a grinding arm and a stressed layer, the stressed layer being configured to bear a force from the grinding arm; a base and a plurality of elastic bodies, the elastic bodies being fixed between the stressed layer and the base; a deformation sensor, configured to detect deformation of the elastic bodies; and an analysis device, configured to obtain the force on the stressed layer according to a detection result of the deformation sensor and an elastic constant of the elastic body.
Claims10
Force measurement system, comprising:
- a grinding arm and a stressed layer, the stressed layer being configured to bear a force from the grinding arm;
- a base and a plurality of elastic bodies, the elastic bodies being fixed between the stressed layer and the base;
- a deformation sensor, configured to detect deformation of the elastic bodies;
- and
- an analysis device, configured to measure the force on the stressed layer according to a detection result of the deformation sensor and an elastic constant of the elastic bodies.
2 more elements
Dependencies are inferred from the claim text.