Control device and non-transitory computer readable recording medium

A non-transitory computer readable recording medium storing a control program for realizing a control device, the control device being connected to a plurality of drive devices for changing a relative positional relationship between an object and a control object executing a predetermined processing on a surface of the object, the control device outputting an operation amount to the plurality of drive devices every control cycle,

• the plurality of drive devices comprising a first drive device for moving the control object relative to the object along a plane facing the surface of the object and a second drive device for moving the control object relative to the object along an orthogonal axis orthogonal to the plane, wherein
• the control program causes a computer to execute:
• generating a first command position of the control object on the plane in each control cycle based on a target trajectory;
• generating a first operation amount output to the first drive device by model predictive control using a first dynamic characteristic model showing a relationship between the first operation amount and a position of the control object on the plane and the first command position;
• generating a second command position of the control object on the orthogonal axis in each control cycle;
• and
• generating a second operation amount output to the second drive device by model predictive control using a second dynamic characteristic model showing a relationship between the second operation amount and a position of the control object on the orthogonal axis and the second command position, wherein
• generating the second command position comprises, based on shape data indicating a surface shape of the object and the first command position, generating the second command position so that a distance between the control object and the surface of the object is constant.