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AssigneeVersum Materials US, LLC
InventorsDAVID C. ESHELMAN, BRADLEY TAYLOR REESE, JEFFREY BARTHOLD, CHRISTOPHER D. FONTANA
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Degassers, degassing systems, and methods of using degassers to remove gas molecules entrapped or dissolved in a processing liquid. The degasser has a vacuum chamber with one or more walls; one or multiple inlets and one or multiple outlets through which the liquid is respectively passed into and out of the vacuum chamber, the inlet(s) and the outlet(s) penetrating the one or more walls; one or multiple separators located inside the vacuum chamber and being pervious to the gas molecules but impervious to the liquid; at least one vacuum for applying through a vacuum port a pressure differential across the separator(s) to cause the gas molecules to leave the liquid and to permeate through the separator(s) thereby removing the entrapped or dissolved gas from the liquid; and optionally one or multiple feed lines in fluid communication with the inlet(s) and two or more than two separators.
A degasser (60) for removing molecules of gasses entrapped or dissolved in a processing liquid (114), the degasser comprising:
The degasser (60) of any of the preceding claims comprising two or more separators (68).
The degasser (60) of any of the preceding claims comprising three or more separators (68).
The degasser (60) of any of the preceding claims comprising one inlet (22).
The degasser (60) of any of the preceding claims comprising two or more inlets (22).
The degasser (60) of any of the preceding claims comprising three or more inlets (22).
The degasser (60) of any of the preceding claims comprising one outlet (23).
The degasser (60) of any of the preceding claims comprising two or more outlets (23).
The degasser (60) of any of the preceding claims comprising three or more outlets (23).
The degasser (68) of any of the preceding claims comprising one feed line (47) in fluid communication with two or more separators (68).
The degasser (60) of any of the preceding claims comprising one feed line (47) in fluid communication with three or more separators (68).
The degasser (60) of any of the preceding claims comprising a collection line (41) in fluid communication with two or more separators (68).
The degasser (60) of any of the preceding claims comprising a collection line (41) in fluid communication with three or more separators (68).
The degasser (60) of any of the preceding claims comprising at least one valve (37) in the feed line (47) and at least one valve (33) in the collection line (41) that when closed isolate a flow path comprising an inlet (22), a separator (68), and an outlet (23) from one or more other flow paths comprising one or more than one other separator (68) in the degasser (60).
The degasser (60) of any of the preceding claims comprising at least one valve (35) upstream of each separator (68) except for one separator (68) so that all but one separator (68) can be isolated from that one separator (68).
The degasser (60) of any of the preceding claims further comprising a pressure gauge (82) and a variable speed pump (83) in fluid communication with the vacuum chamber (62).
The degasser (60) of any of the preceding claims wherein a first separator (68) degasses a first processing fluid (114) and a second separator (68) degasses a second processing fluid (114).
The degasser (60) of any of the preceding claims further comprising a housing (100).
A method of degassing a processing fluid (114) comprising the steps of flowing the processing fluid through the degasser (60) of any of the preceding claims.
The method of any of the preceding claims where the degasser (60) degasses two different fluids.
The method of any of the preceding claims further comprising the step of isolating one separator (68) from one or more other separators (68) that are degassing processing fluid (114).
Dependencies are inferred from the claim text.