Electrochemical deposition apparatus set and electrochemical deposition method

Abstract

The present disclosure provides an electrochemical deposition apparatus set. The electrochemical deposition apparatus set includes: an electrochemical deposition device configured to form an electrochemical deposition film layer on an area to be coated of a substrate; an antioxidation treatment device located on a side of the electrochemical deposition device and configured to performing antioxidation treatment on the substrate formed with the electrochemical deposition film layer; a transmission device configured to carry the substrate and drive the substrate to move at least from the electrochemical deposition device to the antioxidation treatment device.

Dependencies are inferred from the claim text.