Composition comprising an ammonia-activated siloxane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below

A non-aqueous composition comprising

• (a) an organic protic solvent
• (b) ammonia, and
• (c) at least one additive of formulae I or II
• wherein
• R1 is H
• R2 is selected from the group consisting of H, C1 to C10 alkyl, C1 to C10 alkoxy, C6 to C10 aryl, and C6 to C10 aroxy,
• R3 is selected from the group consisting of R2,
• R4 is selected from the group consisting of C1 to C10 alkyl, C1 to C10 alkoxy, C6 to C10 aryl, and C6 to C10 aroxy,
• R10, R12 are independently selected from the group consisting of C1 to C10 alkyl and C1 to C10 alkoxy,
• m is 1, 2 or 3, and
• n is 0 or an integer from 1 to 100.