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US 2022/0166406 A1Published application
Microelectromechanical resonator
AssigneeKYOCERA Tikitin Oy
InventorsVille SAARELA, Antti JAAKKOLA, Aarne OJA
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Abstract
A microelectromechanical (MEMS) resonator includes a spring-mass system having a first weight portion (M1), a second weight portion (M2), and a central spring portion (SP) in between the weight portions.
Claims27
A microelectromechanical resonator, comprising:
- a spring-mass system having
- a first weight portion,
- a second weight portion, and
- a central spring portion in between the weight portions, the resonator having a piezoelectric layer to actuate the resonator.
1 more element
Dependencies are inferred from the claim text.