System and method for detecting abnormality of thin-film deposition process
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWen-Hao Cheng, Hsuan-Chih Chu, Yen-Yu Chen
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Abstract
A system and a method for detecting abnormality of a thin-film deposition process are provided. In the method, a thin-film is deposited on a substrate in a thin-film deposition chamber by using a target, a dimension of a collimator mounted between the target and the substrate is scanned by using at least one sensor disposed in the thin-film deposition chamber to derive an erosion profile of the target, and abnormality of the thin-film deposition process is detected by analyzing the erosion profile with an analysis model trained with data of a plurality of erosion profiles derived under a plurality of deposition conditions.
Claims20
A method for detecting abnormality of a thin-film deposition process, comprising:
- depositing a thin-film on a substrate in a thin-film deposition chamber by using a target;
- scanning a dimension of a collimator mounted between the target and the substrate by using at least one sensor disposed in the thin-film deposition chamber to derive an erosion profile of the target;
- and
- detecting abnormality of the thin-film deposition process by analyzing the erosion profile with an analysis model trained with data of a plurality of erosion profiles derived under a plurality of deposition conditions.
A system for detecting abnormality of a thin-film deposition process, comprising:
- at least one sensor disposed in a thin-film deposition chamber which deposits a thin-film on a substrate by using a target;
- and
- a controller, coupled to the at least one sensor and configured to:
- control the at least one sensor to scan a dimension of a collimator mounted between the target and the substrate to derive an erosion profile of the target after the thin-film deposition process;
- and
- detect abnormality of the thin-film deposition process by analyzing the erosion profile with an analysis model trained with data of a plurality of erosion profiles derived under a plurality of deposition conditions.
A thin-film deposition system, comprising:
- a thin-film deposition chamber, configured to perform a thin-film deposition process;
- at least one sensor, disposed in the thin-film deposition chamber;
- and
- a control system, coupled to the thin-film deposition chamber and the at least one sensor, and configured to:
- control the thin-film deposition chamber to deposit a thin-film on a substrate by using a target;
- control the at least one sensor to scan a dimension of a collimator mounted between the target and the substrate to derive an erosion profile of the target;
- and
- detect abnormality of the thin-film deposition process by analyzing the erosion profile with an analysis model trained with data of a plurality of erosion profiles derived under a plurality of deposition conditions.
Dependencies are inferred from the claim text.