Microfabrication method
AssigneeDexerials Corporation
InventorsAkihiro SHIBATA, Naoto KANEKO, Tsunemoto KURIYAGAWA
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Abstract
A microfabrication method is provided with which it is possible to easily form a fine periodic structure on a surface of any substrate. A glass precursor is applied to a substrate, and the glass precursor is irradiated with short-pulse laser light. By the irradiation with short-pulse laser light, the glass precursor is activated to undergo a thermal reaction, and a fine periodic structure can be easily formed on the surface. Furthermore, by oxidizing the substrate on which the fine periodic structure has been formed, the hue of the surface can be improved while maintaining the fine periodic structure.
Claims10
A production method for an antireflection film comprising:
- an application step of applying a glass precursor onto a substrate;
- and
- an irradiation step of irradiating a short pulse laser to the glass precursor, and forming silica layer having a periodic structure of a size smaller than a wavelength of the short pulse laser,
- wherein the glass precursor is polysilazane having —(SiH2NH)— as a base unit, and pulse duration of the short pulse laser is between 0.01 picoseconds and 5 picoseconds.
Dependencies are inferred from the claim text.