Temperature sensor, heater unit, and substrate processing apparatus
AssigneeKokusai Electric Corporation
InventorsTokunobu AKAO, Tetsuya KOSUGI
Life of this patent
Estimating the term…
Abstract
There is provided a configuration installed on a mount provided with an opening, that includes a main body connected to the mount to penetrate the opening while providing a micro space; a first positioner attached to a side of a leading end portion of the main body with respect to the mount; and a second positioner attached to a side of a tail end portion of the main body with respect to the mount, wherein the main body is movable within a range determined by the micro space, the first positioner, and the second positioner.
Claims15
A temperature sensor installed on a mount provided with an opening, comprising:
- a main body connected to the mount to penetrate the opening while providing a micro space;
- a first positioner attached to a side of a leading end portion of the main body with respect to the mount;
- and
- a second positioner attached to a side of a tail end portion of the main body with respect to the mount,
- wherein the main body is movable within a range determined by the micro space, the first positioner, and the second positioner.
A heater unit comprising:
- a temperature sensor installed on a mount provided with an opening,
- wherein the temperature sensor includes:
- a main body connected to the mount to penetrate the opening while providing a micro space;
- a first positioner attached to a side of a leading end portion of the main body with respect to the mount;
- and
- a second positioner attached to a side of a tail end portion of the main body with respect to the mount, and
- wherein the temperature sensor is configured to be capable of restricting movement of the main body by the micro space, the first positioner, and the second positioner.
A substrate processing apparatus comprising:
- a heater unit including a temperature sensor installed on a mount provided with an opening,
- wherein the temperature sensor includes:
- a main body connected to the mount to penetrate the opening while providing a micro space;
- a first positioner attached to a side of a leading end portion of the main body with respect to the mount;
- and
- a second positioner attached to a side of a tail end portion of the main body with respect to the mount, and
- wherein the temperature sensor is configured to be capable of restricting movement of the main body by the micro space, the first positioner, and the second positioner.
Dependencies are inferred from the claim text.