Hermetically sealed, toughened glass package and method for producing same
AssigneeSchott AG
InventorsJens Ulrich Thomas, Thomas Zetterer, Antti Määttänen, Robert Hettler, Yutaka Onezawa
Life of this patent
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Abstract
A hermetically sealed package includes: a base substrate and a cover substrate which define at least part of the package, the base substrate and the cover substrate being hermetically sealed to one another by at least one laser bonding line, the at least one laser bonding line having a height perpendicular to its bonding plane, at least the cover substrate including a toughened layer at its surface, at least on a side opposite the at least one laser bonding line; and at least one functional area enclosed in the package.
Claims21
A hermetically sealed package, comprising:
- a base substrate and a cover substrate which define at least part of the package, the base substrate and the cover substrate being hermetically sealed to one another by at least one laser bonding line, the at least one laser bonding line having a height (HL) perpendicular to its bonding plane, at least the cover substrate comprising a toughened layer at its surface, at least on a side opposite the at least one laser bonding line;
- and
- at least one functional area enclosed in the package.
A method for providing a plurality of hermetically sealed packages, each package providing a functional area, the method comprising:
- providing at least two substrates, the at least two substrates comprising a cover substrate and a base substrate, wherein at least the cover substrate comprises transparent material at least in sections thereof, wherein the at least two substrates are arranged so as to directly adjoin or be on top of one another;
- hermetically sealing the functional area by bonding the at least two substrates to one another along a bonding line by a laser welding process;
- dicing a respective package by cutting or separation;
- and
- chemically toughening a surface of a respective package by bathing it in a chemical solution.
Dependencies are inferred from the claim text.