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US 2022/0134303 A1Published application
System for treatment and/or coating of substrates
AssigneeXefco Pty Ltd
InventorsThomas HUSSEY, Brian CONOLLY, Scott WHITBY
Life of this patent
Estimating the term…
Abstract
A system for treating a substrate comprising a treatment module and a substrate plane. The substrate extending along a substrate plane to treat the substrate and wherein a fluid is deliverable via the module to a local region between the module and the substrate plane to treat the substrate with a predetermined treatment.
Claims20
A system for treating a substrate, the system comprising;
- a treatment module;
- a substrate plane along which a substrate extends;
- and
- wherein a fluid is deliverable via the module to a local region between the module and the substrate plane.
1 more element
A system for treating substrates, the system comprising;
- a treatment module;
- a movement apparatus for moving a substrate;
- wherein a delivery gas and a monomer are ejected by the module into a plasma region to form a plasma for treating a substrate.
A device for treatment of substrates, the device comprising;
- a treatment module for treating a substrate;
- a movement apparatus for moving the substrate;
- wherein a first fluid conduit and a second fluid conduit are directed to a plasma region, in which each of the first and second fluid conduits carry a discrete fluid to treat a substrate.
Dependencies are inferred from the claim text.