Method for machining synthetic quartz glass substrate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsMasao ANDO, Hiroyuki YAMAZAKI
Life of this patent
Estimating the term…
Abstract
A synthetic quartz glass substrate is machined by bringing a surface of the synthetic quartz glass substrate as the workpiece into contact with and superposing it on a surface of a protective member made of synthetic quartz glass to effect optical contact bonding of the workpiece and the protective member, and passing a cutting tool through the optical contact bonding surfaces. This machining process is able to effectively prevent the generation of microdefects at the cutting tool entry site and extraction site during a cutting operation. Moreover, a fixing agent is not used to join the workpiece and the protective member, and so productivity is high because there is no need for the application and later removal of a fixing agent.
Claims4
A method for machining a synthetic quartz glass substrate, comprising the steps of:
- furnishing a synthetic quartz glass substrate as a workpiece;
- furnishing a member for protecting the workpiece, which protective member is made of synthetic quartz glass;
- optical contact bonding the workpiece and the protective member by bringing a surface of the protective member into contact with and superposing it on a surface of the workpiece;
- and
- cuffing the synthetic quartz glass substrate by passing a cutting tool from the protective member side and through the optical contact bonding surface to the synthetic quartz glass substrate side, from the synthetic quartz glass substrate side and through the optical contact bonding surface to the protective member side, or both from the protective member side and through the optical contact bonding surface to the synthetic quartz glass substrate side and also from the synthetic quartz glass substrate side and through the optical contact bonding surface to the protective member side.
A method for machining synthetic quartz glass substrates, comprising the steps of:
- furnishing a plurality of synthetic quartz glass substrates;
- optical contact bonding the plurality of synthetic quartz glass substrates by mutually contacting and superposing surfaces of the respective synthetic quartz glass substrates to give a workpiece;
- furnishing at least two members for protecting the workpiece;
- which protective member is made of synthetic quartz glass;
- optical contact bonding the workpiece and the protective member by bringing a surface of the protective member into contact with and superposing it on a surface of the workpiece;
- and
- cutting the synthetic quartz Mass substrates by passing a cutting tool from one protective member side and through the optical contact bonding surface thereof to the workpiece side at the synthetic quartz glass substrate spaced furthest from the one protective member and from the synthetic quartz glass substrate spaced furthest from the one protective member and through the optical contact bonding surface thereof to the other protective member side.
Dependencies are inferred from the claim text.