Control method, inspection system, and storage medium
AssigneeKabushiki Kaisha Toshiba
InventorsToshiyuki ONO, Atsushi MATSUMURA
Life of this patent
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Abstract
According to one embodiment, a control method includes setting a transmission angle of an ultrasonic wave to a standard angle. The control method further includes transmitting an ultrasonic wave at the set transmission angle and detecting an intensity of a reflected wave from an object. The control method further includes calculating a tilt angle based on a gradient of the intensity. The tilt angle indicates a tilt of the object. The control method further includes resetting the transmission angle based on the tilt angle.
Claims19
1-10. (canceled)
A control method, comprising:
- transmitting an ultrasonic wave at a set transmission angle and detecting an intensity of a reflected wave from an object;
- and
- calculating a tilt angle based on a gradient of the intensity, the tilt angle indicating a tilt of the object.
An inspection system, comprising:
- a probe including a sensor configured to perform a transmission and a reception of an ultrasonic wave;
- and
- a processor
- transmitting an ultrasonic wave at a set transmission angle and detecting an intensity of a reflected wave from an object,
- calculating a tilt angle based on a gradient of the intensity, the tilt angle indicating a tilt of the object.
A non-transitory computer-readable storage medium storing a program causing a processor to perform at least:
- transmitting an ultrasonic wave at a set transmission angle and detecting an intensity of a reflected wave from an object;
- and
- calculating a tilt angle based on a gradient of the intensity, the tilt angle indicating a tilt of the object.
Dependencies are inferred from the claim text.