Methods and apparatus for detecting defects in semiconductor systems
AssigneeAxiomatique Technologies, Inc.
InventorsTrevor A. NORMAN, Robert MAMAZZA, Francisco Xavier MACHUCA
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Abstract
A defect detection system comprising of an incoherent light source and a collimating light source attachment to produce spatially coherent light waves (e.g., X-rays) that are capable of deeply penetrating a device under test (e.g., a semiconductor). Changes in the spatial coherency of the light waves incident upon the device under test may be utilized to generate one or more electronic maps that indicate one or more defects within the device under test, such as, cracks, gaps, and/or air pockets within the device under test.
Claims20
A system comprising:
- a light emitting device that outputs a light beam capable of penetrating a device under test at least to a first depth, wherein the light beam, upon initial output, comprises spatially coherent light waves;
- a video detection chain that, based on light waves that were incident on the device under test, generates an electronic map indicating one or more defects within the device under test;
- and
- the video detection chain further outputs the electronic map.
A system for detect detection within semiconductor devices comprising:
- a light emitting device that outputs a light beam capable of penetrating a device under test at least to a first depth, wherein the light beam, upon initial output, comprises spatially coherent light waves;
- and
- a video detection chain, wherein:
- the video detection chain is displaced between 10 millimeters and 1 meter away from the device under test;
- the video detection chain receives, based at least in part on light waves that were incident on the device under test, an image of at least a portion of the device under test, wherein the magnification of the size of the image is in unity to the size of the portion of the device under test;
- the video detection chain, based on the image of at least the portion of the device under test, generates an electronic map indicating one or more defects within the device under test;
- and
- the video detection chain outputs the electronic map.
A method for detect detection within semiconductor devices comprising:
- outputting, from a light emitting device a light beam capable of penetrating a device under test at least to a first depth, wherein the light beam comprises spatially coherent light waves;
- receiving, by a video detection chain, based at least in part on light waves that were incident on the device under test, an image of at least a portion of the device under test, wherein the magnification of the size of the image is in unity to the size of the portion of the device under test, the video detection chain being displaced between 10 millimeters and 1 meter away from the device under test;
- generating, based at least in part on the image of at least the portion of the device under test, an electronic map indicating one or more defects within the device under test;
- and
- outputting the electronic map.
Dependencies are inferred from the claim text.