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US 2022/0119947 A1Published application
Chlorodisilazanes
AssigneeDow Silicones Corporation
InventorsByung K. HWANG, Brian D. Rekken, Michael D. Telgenhoff, Xiaobing Zhou
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Abstract
Disclosed herein are chlorodisazanes; silicon-heteroatom compounds synthesized therefrom; devices containing the silicon-heteroatom compounds; methods of making the chlorodisilazanes, the silicon-heteroatom compounds, and the devices; and uses of the chlorodisilazanes, silicon-heteroatom compounds, and devices.
Claims20
(canceled)
A method of making 1,1,1,3,3-pentachlorodisilazane, the method comprising:
- contacting 1,1,1-trichloro-3,3,3-trimethyldisilazane with trichlorosilane (HSiCl3) to give the 1,1,1,3,3-pentachlorodisilazane.
A method of treating an initial surface of a substrate, the method comprising:
- a first contacting step comprising contacting the initial surface of the substrate with a vapor of a chlorodisilazane of formula (I):
- X1Cl2SiN(H)SiCl2X2 (I), wherein each of X1 and X2 independently is H or Cl, using a first deposition method to give a treated surface on the substrate.
A method of making 1,1,1,3,3-pentachlorodisilazane, the method comprising:
- contacting three mole equivalents of ammonia with one mole equivalent of trichlorosilane and 1 mole equivalent of tetrachlorosilane to give one mole equivalent of the 1,1,1,3,3-pentachlorodisilazane and two mole equivalents of ammonium chloride.
Dependencies are inferred from the claim text.