Surface acoustic wave (saw) device with high permittivity dielectric for intermodulation distortion improvement

A wireless device comprising:

• a radio frequency (RF) circuit;
• and
• a surface acoustic wave (SAW) filter coupled to the RF circuit, the SAW filter comprising:
• a piezoelectric substrate;
• an interdigital transducer (IDT) disposed above the piezoelectric substrate and comprising a first electrode having a first plurality of fingers and a second electrode having a second plurality of fingers interdigitated with the first plurality of fingers of the first electrode;
• and
• a plurality of regions of dielectric material disposed above the piezoelectric substrate and between the first and second pluralities of fingers of the IDT, the dielectric material of the plurality of regions having a relative permittivity greater than 3.9.

A surface acoustic wave (SAW) device comprising:

• a piezoelectric substrate;
• a dielectric layer disposed above the piezoelectric substrate and primarily comprising a different material than the piezoelectric substrate;
• and
• an interdigital transducer (IDT) disposed above the dielectric layer and comprising a first electrode having a first plurality of fingers and a second electrode having a second plurality of fingers interdigitated with the first plurality of fingers of the first electrode.