Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine

A conversion method for converting a click position of a flat panel display into a light pen simulated signal for a semiconductor manufacturing machine, comprising:

• obtaining the click position when an option of a graphical user interface (GUI) of the semiconductor manufacturing machine displayed on a display screen of the flat panel display is selected;
• obtaining the light pen simulated signal according to the click position, a first display resolution of the flat panel display and a second display resolution of the semiconductor manufacturing machine;
• and
• providing the light pen simulated signal to the semiconductor manufacturing machine according to a synchronization signal from the semiconductor manufacturing machine.

A semiconductor manufacturing system, comprising:

• a semiconductor manufacturing machine;
• a flat panel display configured to display a graphical user interface (GUI) of the semiconductor manufacturing machine;
• and
• a converter coupled to the semiconductor manufacturing machine through a first cable and the flat panel display through a second cable, and configured to convert a click position from the flat panel display into a light pen position according to a mapping table of a first display resolution of the flat panel display and a second display resolution of the semiconductor manufacturing machine, and to provide a light pen simulated signal to the semiconductor manufacturing machine according to the light pen position and a synchronization signal from the semiconductor manufacturing machine,
• wherein the first display resolution is higher than the second display resolution.