Manufacturing method for porous glass deposit and apparatus for manufacturing porous glass deposit
AssigneeShin-Etsu Chemical Co., Ltd.
InventorRyo KAWAMOTO
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Abstract
Provided is a manufacturing method for a porous glass deposit, comprising by depositing glass fine particle onto a starting material being pulled up in a rotating manner within a reaction chamber using a plurality of burners by which glass fine particles are deposited at positions that are different from each other, supplying humidified clean air to the reaction chamber through an air inlet provided on a wall surface of the reaction chamber in a manufacturing process of the porous glass deposit.
Claims20
A manufacturing method for a porous glass deposit, comprising:
- by depositing glass fine particle onto a starting material being pulled up in a rotating manner within a reaction chamber using a plurality of burners by which glass fine particles are deposited at positions that are different from each other, supplying humidified clean air to the reaction chamber through an air inlet provided on a wall surface of the reaction chamber in a manufacturing process of the porous glass deposit.
An apparatus for manufacturing a porous glass deposit, wherein
- by depositing glass fine particle onto a starting material being pulled up in a rotating manner within a reaction chamber using a plurality of burners by which glass fine particles are deposited at positions that are different from each other, humidified clean air is supplied to the reaction chamber through an air inlet provided on a wall surface of the reaction chamber in a manufacturing process of the porous glass deposit.
An apparatus for manufacturing a porous glass deposit, comprising:
- a reaction chamber having arranged therein a starting material, and provided thereon an air outlet and a plurality of air inlets;
- a plurality of burners each configured to deposit, from a position that is different from each other, glass fine particles toward the starting material being pulled up in a rotating manner within the reaction chamber;
- an air distribution container attached to the reaction chamber and having a plurality of discharge ports having the same shape as the plurality of air inlets of the reaction chamber, wherein an interior space thereof communicates with the reaction chamber through the plurality of discharge ports and the plurality of air inlets;
- a blower configured to supply clean air to the reaction chamber via the air distribution container;
- and
- a humidifier configured to humidify the clean air supplied to the reaction chamber by the blower.
Dependencies are inferred from the claim text.