Substrate storage apparatus provided with storage environment detection
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh, Yun-Zi Lin
Life of this patent
Estimating the term…
Abstract
The invention discloses a substrate storage apparatus having a detecting device detachably connecting to an outer pod. The detecting device includes a sensing member having a sensing terminal, a cavity and a sensor. The sensing terminal detachably connects to the outer pod such that the sensing terminal exposes in an accommodating space inside of the outer pod. The cavity receiving the sensor extends to an outside of the outer pod and the accommodating space. The cavity communicates with the accommodating space through the sensing terminal, allowing the sensor to read information regarding the accommodating space.
Claims25
A substrate storage apparatus, having an outer pod accommodating an inner pod and a detection device detachably connected to the outer pod, the inner pod used for accommodating a substrate, the detection device comprising:
- a sensing member, having a sensing terminal, a cavity and a sensor, the sensing member detachably connected to the outer pod such that the sensing terminal is exposed in an accommodating space on an inside of the outer pod, the cavity extending between an outside of the outer pod and the accommodating space and accommodates the sensor, the cavity being in flow communication with the accommodating space of the outer pod through the sensing terminal, thereby allowing the sensor to read information associated with the accommodating space.
A method of mounting a detection device to a substrate storage apparatus, comprising:
- providing a sensing member, the sensing member having a sensing terminal, a cavity, a sensor and a connection terminal, wherein the cavity accommodates the sensor and the connection terminal is provided with a first connector;
- detachably connecting the sensing member to an outer pod, such that the sensing terminal is exposed in an accommodating space of the outer pod, the cavity extends between an outside of the outer pod and the accommodating space, and the cavity is in flow communication with the accommodating space of the outer pod through the sensing terminal;
- and
- extending the first connector in a mounting direction to the outside of the outer pod.
A detection device for a substrate storage apparatus to read information of an accommodating space, comprising:
- a sensing member, having a sensing terminal, a connection terminal and a cavity extending between the sensing terminal and the connection terminal, the cavity accommodating a sensor and the cavity being in flow communication with an outside of the sensing member through the sensing terminal;
- and
- an mating member, having an mating terminal and a circuit component, wherein the mating terminal is detachably connected to the sensing member and is electrically connected to the sensor, and the circuit component is electrically connected to the sensor through the mating terminal.
Dependencies are inferred from the claim text.