Control method of inspection apparatus and inspection apparatus

An inspection apparatus comprising:

• a stage on which a substrate having an inspection object to be inspected is mounted;
• a plurality of light sources configured to emit light to heat the substrate;
• a controller configured to control the plurality of light sources;
• and
• one or more correctors configured to correct one or more respective control commands output from the controller to at least one or more respective light sources of the plurality of light sources,
• wherein the controller performs
• individually lighting the plurality of light sources and obtaining a plurality of first temperature distributions of the substrate;
• obtaining a second temperature distribution representing a sum of the plurality of first temperature distributions;
• obtaining one or more correction values for correcting, by the one or more correctors, an amount of light output from the at least one or more light sources based on the second temperature distribution;
• and
• correcting the amount of light output from each of the at least one or more respective light sources by the one or more respective correctors using the one or more correction values.