Tool for annealing of magnetic stacks
AssigneeIII Holdings 1, LLC
InventorKrishnakumar Mani
Life of this patent
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Abstract
In one embodiment of the invention, there is provided a tool for annealing a magnetic stack. The tool includes a housing defining a heating chamber; a holding mechanism to hold at least one wafer in a single line within the heating chamber, a heating mechanism to heat the at least one wafer; and a magnetic field generator to generate a magnetic field whole field lines pass through the single line of wafers during a magnetic annealing process; wherein the holding mechanism comprises a wafer support of holding the single line of wafers between the heating mechanism and the magnetic field generator.
Claims14
(canceled)
A tool for annealing a magnetic stack of a wafer, the tool comprising:
- a magnetic field generator positioned above an upper major surface of the wafer, the magnetic field generator comprising a plurality of conductors that traverse an upper major surface of the wafer, and the plurality of conductors being configured to generate a magnetic field comprising a plurality of magnetic field lines that align a magnetic domain in the wafer with the upper major surface of the wafer.
Dependencies are inferred from the claim text.