FRONT END MODULES FOR 5.6 GHz & 6.6 GHz Wi-Fi ACOUSTIC WAVE RESONATOR RF FILTER CIRCUITS

A 5.6 GHz front end module (FEM) device, the device comprising:

• a power amplifier (PA) electrically coupled to an input node;
• a diversity switch electrically coupled to the PA and an output node;
• and
• a 5.6 GHz bulk acoustic wave (BAW) resonator electrically coupled to the diversity switch and an antenna, the 5.6 GHz BAW resonator having a passband frequency of 5.170 GHz to 5.895 GHz;
• wherein the 5.6 GHz BAW resonator comprises
• a substrate;
• a support layer overlying the substrate, the support layer having an air cavity;
• a first electrode overlying the air cavity and a portion of the support layer;
• a first passivation layer overlying the support layer and being physically coupled to the first electrode;
• a piezoelectric film overlying the support layer, the first electrode, and the air cavity, the piezoelectric film having an electrode contact via;
• a second electrode formed overlying the piezoelectric film;
• and
• a top metal formed overlying the piezoelectric film, the top metal being physically coupled to the first electrode through the electrode contact via.

A 6.6 GHz front end module (FEM) device, the device comprising:

• a power amplifier (PA) electrically coupled to an input node;
• a 6.6 GHz resonator electrically coupled to the PA;
• wherein the 6.6 GHz resonator comprises
• a substrate;
• a support layer overlying the substrate, the support layer having an air cavity;
• a first electrode overlying the air cavity and a portion of the support layer;
• a first passivation layer overlying the support layer and being physically coupled to the first electrode;
• a piezoelectric film overlying the support layer, the first electrode, and the air cavity, the piezoelectric film having an electrode contact via;
• a second electrode formed overlying the piezoelectric film;
• and
• a top metal formed overlying the piezoelectric film, the top metal being physically coupled to the first electrode through the electrode contact via;
• and
• a diversity switch electrically coupled the 6.6 GHz resonator, an output node, and an antenna.

A 6.6 GHz front end module (FEM) device, the device comprising:

• a power amplifier (PA) electrically coupled to an input node;
• a diversity switch electrically coupled to the PA and an output node;
• and
• a 6.6 GHz resonator electrically coupled to the diversity switch and an antenna;
• wherein the 6.6 GHz resonator comprises
• a substrate;
• a support layer overlying the substrate, the support layer having an air cavity;
• a first electrode overlying the air cavity and a portion of the support layer;
• a first passivation layer overlying the support layer and being physically coupled to the first electrode;
• a piezoelectric film overlying the support layer, the first electrode, and the air cavity, the piezoelectric film having an electrode contact via;
• a second electrode formed overlying the piezoelectric film;
• and
• a top metal formed overlying the piezoelectric film, the top metal being physically coupled to the first electrode through the electrode contact via.