Composite substrate, elastic wave element, and production method for composite substrate
AssigneeNGK Insulators, Ltd.
InventorsYuji HORI, Takahiro YAMADERA
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Abstract
A composite substrate includes a supporting substrate composed of quartz, a piezoelectric material substrate, a first amorphous layer present between the supporting substrate and piezoelectric material substrate, and a second amorphous layer present between the supporting substrate and first amorphous layer. The first amorphous layer contains 10 to 30 atom % of silicon atoms, and the second amorphous layer contains 1 to 10 atom % of fluorine atoms.
Claims8
A composite substrate comprising:
- a supporting substrate comprising quartz;
- a piezoelectric material substrate;
- a first amorphous layer present between said supporting substrate and said piezoelectric material substrate;
- and
- a second amorphous layer present between said supporting substrate and said first amorphous layer,
- wherein said first amorphous layer contains 10 to 30 atom % of silicon atoms, and
- wherein said second amorphous layer contains 1 to 10 atom % of fluorine atoms.
A method of producing a composite substrate comprising a supporting substrate comprising quartz and a piezoelectric material substrate, said method comprising the steps of;
- irradiating a plasma containing at last one of oxygen gas and nitrogen gas onto a surface of said supporting substrate to generate an activated surface;
- irradiating a plasma containing at least one of oxygen gas and nitrogen gas onto a surface of said piezoelectric material substrate to generate an activated surface;
- contacting said activated surface of said supporting substrate and said activated surface of said piezoelectric material substrate to obtain a bonded body;
- and
- subjecting said bonded body to a thermal treatment at a temperature of 250° C. to 350° C.
Dependencies are inferred from the claim text.