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US 2022/0103153 A1Published application
Method for producing acoustic resonator and filter with electrode having zig-zag edge
AssigneeVanguard International Semiconductor Singapore Pte. Ltd.
InventorsYou Qian, Humberto CAMPANELLA PINEDA, RAKESH KUMAR
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Abstract
Method of designing a BAW resonator and filter and the resulting devices are provided. Embodiments include patterning a bottom electrode of a resonator, patterning a top electrode of the resonator, and intersecting area of the resonator, wherein the effective area includes a closed-loop contour line including a pulse function pattern with predefined amplitude, period and a number of repetitions of pulses along the closed-loop contour line.
Claims16
A method comprising:
- defining a pulse function to create a contour line of a bulk acoustic wave (BAW) resonator;
- providing segments of the contour line based on pulse function amplitude, period and contour length;
- and
- connecting endpoints of the segments to form a closed-loop contour line enclosing an effective area of the BAW resonator.
1 more element
A method comprising:
- patterning a bottom electrode of a resonator;
- patterning a top electrode of the resonator;
- and
- intersecting areas of the top and bottom electrodes to provide an effective area of the resonator,
- wherein the effective area comprises a closed-loop contour line including a pulse function pattern with pre-defined amplitude, period and a number of repetitions of pulses along the closed-loop contour line.
2 more elements
Dependencies are inferred from the claim text.