Bulk acoustic wave resonator with mass loading layer
AssigneeSkyworks Global Pte. Ltd.
InventorsKwang Jae Shin, Jiansong Liu, Jong Duk Han, Jae Hyung Lee, Yiliu Wang, Yosuke Hamaoka, Alexandre Augusto Shirakawa, Benfeng Zhang
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Abstract
Aspects of this disclosure relate to bulk acoustic wave resonators. A bulk acoustic wave resonator includes a patterned mass loading layer that affects a resonant frequency of the bulk acoustic wave resonator. The patterned mass loading layer can have a duty factor in a range from 0.2 to 0.8 in a main acoustically active region of the bulk acoustic wave resonator. Related filters, acoustic wave dies, radio frequency modules, wireless communications devices, and methods are disclosed.
Claims20
A bulk acoustic wave resonator comprising:
- a first electrode over an acoustic reflector;
- a piezoelectric layer over the first electrode;
- a second electrode over the piezoelectric layer;
- and
- a patterned mass loading layer having a duty factor in a range from 0.2 to 0.8 in a main acoustically active region of the bulk acoustic wave resonator, the patterned mass loading layer arranged to affect a resonant frequency of the bulk acoustic wave resonator.
An acoustic wave filter comprising:
- a bulk acoustic wave resonator including a first electrode over an acoustic reflector, a piezoelectric layer over the first electrode, a second electrode over the piezoelectric layer, and a patterned mass loading layer having a duty factor in a range from 0.2 to 0.8 in a main acoustically active region of the bulk acoustic wave resonator, the patterned mass loading layer arranged to affect a resonant frequency of the bulk acoustic wave resonator;
- and
- a plurality of additional acoustic wave resonators, the acoustic wave filter configured to filter a radio frequency signal.
A wireless communication device comprising:
- an acoustic wave filter including a bulk acoustic wave resonator, the bulk acoustic wave resonator including a first electrode over an acoustic reflector, a piezoelectric layer over the first electrode, a second electrode over the piezoelectric layer, and a patterned mass loading layer having a duty factor in a range from 0.2 to 0.8 in a main acoustically active region of the bulk acoustic wave resonator, the patterned mass loading layer arranged to affect a resonant frequency of the bulk acoustic wave resonator;
- an antenna operatively coupled to the acoustic wave filter;
- a radio frequency amplifier operatively coupled to the acoustic wave filter and configured to amplify a radio frequency signal;
- and
- a transceiver in communication with the radio frequency amplifier.
Dependencies are inferred from the claim text.