Directly modulated laser
AssigneeII-Vi Delaware, Inc.
InventorYasuhiro Matsui
Life of this patent
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Abstract
A laser includes a substrate, first and second claddings, a gain medium, and multiple supports. The first cladding is spaced apart from the substrate by an air gap. A thickness of the first cladding in a vertical direction is in a range from 0.05-0.15 micrometers. The gain medium is disposed on the first cladding opposite the air gap. The second cladding is disposed on the gain medium opposite the first cladding. A thickness of the second cladding in the vertical direction is in a range from 0.05-0.15 micrometers. The supports are coupled to each of the substrate, the first cladding, the gain medium, and the second cladding to retain the first cladding, the gain medium, and the second cladding spaced apart from the substrate.
Claims20
A laser, comprising:
- a substrate;
- a first cladding spaced apart from the substrate by an air gap, wherein a thickness of the first cladding in a vertical direction is in a range from 0.05-0.15 micrometers;
- a gain medium disposed on the first cladding opposite the air gap;
- a second cladding disposed on the gain medium opposite the first cladding, wherein a thickness of the second cladding in the vertical direction is in a range from 0.05-0.15 micrometers;
- and
- a plurality of supports coupled to each of the substrate, the first cladding, the gain medium, and the second cladding to retain the first cladding, the gain medium, and the second cladding spaced apart from the substrate.
A laser, comprising:
- a substrate;
- a waveguide spaced apart from the substrate by an air gap, wherein the waveguide includes:
- a distributed feedback (DFB) active section;
- a passive section inline with the DFB active section;
- and
- a distributed Bragg reflector (DBR) section inline with the DFB active section, the DFB active section positioned between the passive section and the DBR section;
- and
- a low reflection (LR) mirror formed at a front of the passive section of the waveguide.
A method to form a laser, the method comprising:
- depositing a sacrificial layer on a substrate;
- forming a waveguide on the sacrificial layer, the waveguide including first and second claddings and a gain medium positioned between the first and second claddings;
- forming a first current blocking structure laterally adjacent to a first side of the waveguide;
- forming a second current blocking structure laterally adjacent to a second side of the waveguide that is opposite the first side of the waveguide;
- and
- forming an air gap between the substrate and the waveguide by selectively etching the sacrificial layer through holes that pass through a corresponding one of the first and second current blocking structures to the sacrificial layer.
Dependencies are inferred from the claim text.