Optical element for a deep ultraviolet light source
AssigneeCymer, Inc.
InventorsSaptaparna Das, Eric Anders Mason, John Theodore Melchior
Life of this patent
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Abstract
An optical element for a deep-ultraviolet light source includes a crystalline substrate; a coating on an exterior surface of the crystalline substrate, the coating having a thickness along a direction that extends away from the exterior surface; and a structure on and/or in the coating, the structure including a plurality of features that extend away from the crystalline substrate along the direction. The features include an amorphous dielectric material and are arranged such that an index of refraction of the structure varies along the direction.
Claims33
An optical element for a deep-ultraviolet light source, the optical element comprising:
- a crystalline substrate;
- a coating on an exterior surface of the crystalline substrate, the coating having a thickness along a direction that extends away from the exterior surface;
- and
- a structure on and/or in the coating, the structure comprising a plurality of features that extend away from the crystalline substrate along the direction, wherein the features comprise an amorphous dielectric material and are arranged such that an index of refraction of the structure varies along the direction.
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A deep-ultraviolet (DUV) light source comprising:
- a chamber comprising a housing configured to enclose a gaseous gain medium;
- and
- at least one optical element configured to transmit DUV light, wherein the at least one optical element comprises:
- a substrate comprising a crystalline material configured to transmit DUV light;
- a coating on an exterior surface of the substrate, the coating having a thickness along a direction that extends away from the exterior surface;
- and
- a structure on and/or in the coating, the structure comprising a plurality of features that extend away from exterior surface along the direction, wherein the features comprise an amorphous material and the features are arranged such that an index of refraction of the structure varies along the direction.
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Dependencies are inferred from the claim text.