Aqueous solution precursors for making oxide thin films, and composition and method for making conductive oxide thin films therefrom
AssigneeOregon State University
InventorsCory K. Perkins, Douglas A. Keszler
Life of this patent
Estimating the term…
Abstract
Reagents and aqueous solutions thereof are described that are useful for aqueous processing to form thin films comprising metal oxides. A film, or layered film, may be incorporated into working devices where the thin film provides useful optical properties, electrical properties, or both.
Claims20
An aqueous solution for solution processing to form metal oxide films, the solution comprising a metal salt selected from an indium salt, a tin salt, a titanium salt, a cadmium salt, or any combination thereof, wherein the metal salt or salts has a purity greater than 99%.
An aqueous-solution produced thin film, comprising Sn:In2O3, Ti:In2O3, Cd2SnO4, or a combination thereof.
A method for forming a conductive metal oxide thin film, comprising:
- preparing an aqueous solution comprising a metal salt selected from an indium salt, a tin salt, a titanium salt, a cadmium salt, or any combination thereof;
- applying the solution to a substrate to form a thin film;
- and
- heating the substrate to form a conductive metal oxide thin film.
A method, comprising:
- providing an aqueous solution comprising a metal salt having a purity of greater than 99% selected from an indium salt, a tin salt, a titanium salt, a cadmium salt, or any combination thereof;
- applying the solution to a substrate to form a thin film by spin coating, roll coating, spray coating, ink-jet printing, mist deposition, dye-slot coating, dip coating, doctor blade application or combinations thereof;
- heating the substrate to form a conductive metal oxide thin film;
- and
- assembling a device comprising the substrate and conductive metal oxide thin film.
Dependencies are inferred from the claim text.