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US 2022/0102612 A1Published application
Vacuum encapsulated josephson junction
AssigneeInternational Business Machines Corporation
InventorsIsaac Lauer, Karthik Balakrishnan, Jeffrey Sleight, David James Frank
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Abstract
Devices, systems, methods, and/or computer-implemented methods that can facilitate a qubit device comprising a vacuum encapsulated Josephson junction are provided. According to an embodiment, a device can comprise a substrate having an encapsulated vacuum cavity provided on the substrate. The device can further comprise one or more superconducting components of a superconducting circuit provided inside the encapsulated vacuum cavity.
Claims20
A device, comprising:
- a substrate having an encapsulated vacuum cavity provided on the substrate;
- and
- one or more superconducting components of a superconducting circuit provided inside the encapsulated vacuum cavity.
A method, comprising:
- forming one or more superconducting components of a superconducting circuit inside a vacuum cavity provided on a substrate;
- and
- enclosing the vacuum cavity based on the forming to encapsulate the one or more superconducting components inside the vacuum cavity.
A device, comprising:
- a substrate having an encapsulated vacuum cavity provided on the substrate;
- and
- one or more superconducting components comprising one or more epitaxial films provided inside the encapsulated vacuum cavity.
Dependencies are inferred from the claim text.