Manufacturing method for semiconductor film, photoelectric conversion element, image sensor, and semiconductor film
AssigneeFUJIFILM Corporation
InventorsMasashi ONO, Masahiro TAKATA, Tetsushi MIYATA
Life of this patent
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Abstract
A semiconductor film contains aggregates of semiconductor quantum dots containing a metal atom and a ligand that is coordinated to the semiconductor quantum dot, where the ligand contains a first ligand that is an inorganic halide and a second ligand that is represented by any one of Formulae (A) to (C). XA1 and XA2 are separated by LA1 by 1 or 2 atoms, XB1 and XB3, and XB2 and XB3 are respectively independently separated by LB1 and LB2 by 1 or 2 atoms, and XC1 and XC4, XC2 and XC4, and XC3 and XC4 are respectively independently separated by LC1, LC2, or LC3 by 1 or 2 atoms.
Claims20
A semiconductor film comprising:
- aggregates of semiconductor quantum dots containing a metal atom;
- and
- a ligand that is coordinated to the semiconductor quantum dot,
- wherein the ligand contains a first ligand that is an inorganic halide and a second ligand that is represented by any one of Formulae (A) to (C);
- in Formula (A), XA1 and XA2 each independently represent a thiol group, an amino group, a hydroxy group, a carboxy group, a sulfo group, a phospho group, or a phosphonic acid group,
- LA1 represents a hydrocarbon group, XA1 and XA2 are separated by LA1 by 1 or 2 atoms, and
- in a case where one of XA1 and XA2 is a thiol group and the other is a carboxy group, XA1 and XA2 are separated by LA1 by 1 atom;
- in Formula (B), XB1 and XB2 each independently represent a thiol group, an amino group, a hydroxy group, a carboxy group, a sulfo group, a phospho group, or a phosphonic acid group,
- XB3 represents S, O, or NH,
- LB1 and LB2 each independently represent a hydrocarbon group,
- XB1 and XB3 are separated by LB1 by 1 or 2 atoms, and
- XB2 and XB3 are separated by LB2 by 1 or 2 atoms;
- in Formula (C), XC1 to XC3 each independently represent a thiol group, an amino group, a hydroxy group, a carboxy group, a sulfo group, a phospho group, or a phosphonic acid group,
- XC4 represents N,
- LC1 to LC3 each independently represent a hydrocarbon group,
- XC1 and XC4 are separated by LC1 by 1 or 2 atoms,
- XC2 and XC4 are separated by LC2 by 1 or 2 atoms, and
- XC3 and XC4 are separated by LC3 by 1 or 2 atoms.
A manufacturing method for a semiconductor film, comprising:
- a semiconductor quantum dot aggregate forming step of applying a semiconductor quantum dot dispersion liquid containing semiconductor quantum dots that contain a metal atom, a third ligand that is coordinated to a semiconductor quantum dot and that is different from a first ligand which is an inorganic halide and a second ligand which is represented by any one of Formulae (A) to (C), and a solvent, onto a substrate to form a film of aggregates of the semiconductor quantum dots;
- and
- a ligand exchange step of applying a ligand solution 1 containing the first ligand which is an inorganic halide and a solvent, and a ligand solution 2 containing the second ligand which is represented by any one of Formulae (A) to (C), and a solvent, or applying a ligand solution 3 containing the first ligand which is an inorganic halide, the second ligand which is represented by any one of Formulae (A) to (C), and a solvent, onto the film of the aggregates of the semiconductor quantum dots formed by the semiconductor quantum dot aggregate forming step, to exchange the third ligand coordinated to the semiconductor quantum dot with the first ligand and the second ligand;
- in Formula (A), XA1 and XA2 each independently represent a thiol group, an amino group, a hydroxy group, a carboxy group, a sulfo group, a phospho group, or a phosphonic acid group,
- LA1 represents a hydrocarbon group, XA1 and XA2 are separated by LA1 by 1 or 2 atoms, and
- in a case where one of XA1 and XA2 is a thiol group and the other is a carboxy group, XA1 and XA2 are separated by LA1 by 1 atom;
- in Formula (B), XB1 and XB2 each independently represent a thiol group, an amino group, a hydroxy group, a carboxy group, a sulfo group, a phospho group, or a phosphonic acid group,
- XB3 represents S, O, or NH,
- LB1 and LB2 each independently represent a hydrocarbon group,
- XB1 and XB3 are separated by LB1 by 1 or 2 atoms, and
- XB2 and XB3 are separated by LB2 by 1 or 2 atoms;
- in Formula (C), XC1 to XC3 each independently represent a thiol group, an amino group, a hydroxy group, a carboxy group, a sulfo group, a phospho group, or a phosphonic acid group,
- XC4 represents N,
- LC1 to LC3 each independently represent a hydrocarbon group,
- XC1 and XC4 are separated by LC1 by 1 or 2 atoms,
- XC2 and XC4 are separated by LC2 by 1 or 2 atoms, and
- XC3 and XC4 are separated by LC3 by 1 or 2 atoms.
Dependencies are inferred from the claim text.