Detection device and method for manufacturing the same
AssigneeJapan Display Inc.
InventorsSatoshi CHINEN, Morikazu NOMURA
Life of this patent
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Abstract
According to an aspect, a detection device includes: a substrate; a plurality of photodiodes arranged on a first principal surface of the substrate; a protective film that covers the photodiodes; a plurality of lenses provided for each of the photodiodes so as to face the photodiode with the protective film interposed between the lenses and the photodiodes; and a projection provided between the lenses. A top of the projection is located at a position higher than a top of each of the lenses when viewed from the first principal surface.
Claims20
A detection device comprising:
- a substrate;
- a plurality of photodiodes arranged on a first principal surface of the substrate;
- a protective film that covers the photodiodes;
- a plurality of lenses provided for each of the photodiodes so as to face the photodiode with the protective film interposed between the lenses and the photodiodes;
- and
- a projection provided between the lenses, wherein
- a top of the projection is located at a position higher than a top of each of the lenses when viewed from the first principal surface.
A method for manufacturing a detection device, the detection device comprising a substrate, a plurality of photodiodes arranged on a first principal surface of the substrate, a protective film provided on the substrate so as to cover the photodiodes, and a plurality of lenses provided for each of the photodiodes so as to overlap the photodiode, the method comprising:
- stacking a pair of the substrates together, with the first principal surfaces of the pair of the substrates facing each other, the substrates each having a projection formed on the substrate, the projection having a height greater than a height of the lenses in a direction orthogonal to the substrate;
- and
- polishing a second principal surface on an opposite side of the first principal surface of each of the substrates in a state where the pair of the substrates are stacked together, wherein
- at the stacking the pair of the substrates together, the projection of one of the detection devices abuts on a portion of another of the detection devices facing the one detection device, and the lenses of the one detection device face the lenses of the other detection device without contacting one another.
Dependencies are inferred from the claim text.