Cfet sram bit cell with two stacked device decks
AssigneeTokyo Electron Limited
InventorsDaniel CHANEMOUGAME, Lars LIEBMANN, Jeffrey SMITH
Life of this patent
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AssigneeTokyo Electron Limited
InventorsDaniel CHANEMOUGAME, Lars LIEBMANN, Jeffrey SMITH
Estimating the term…
A static random access memory (SRAM) structure is provided. The structure includes a plurality of SRAM bit cells on a substrate. Each SRAM bit cell includes at least six transistors including at least two NMOS transistors and at least two PMOS transistors. Each of the at least six transistors being lateral transistors with channels formed from nano-sheets grown by epitaxy. The at least six transistors positioned in two decks in which a second deck is positioned vertically above a first deck relative to a working surface of the substrate, wherein at least one NMOS transistor and at least one PMOS transistor share a common vertical gate. A first inverter formed using a first transistor positioned in the first deck and a second transistor positioned in the second deck. A second inverter formed using a third transistor positioned in the first deck and a fourth transistor positioned in the second deck. A pass gate is located in either the first deck or the second deck.
A static random access memory (SRAM), comprising:
A static random access memory (SRAM), comprising:
A method for forming a static random access memory (SRAM) bit cell on a substrate, the method comprising:
Dependencies are inferred from the claim text.