Method of forming electrical fuse matrix
AssigneeNanya Technology Corporation
InventorHsih-Yang CHIU
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Abstract
An electrical fuse matrix includes a plurality of anti-fuse structures, a plurality of top metal plates, and a plurality of bottom metal plates. The anti-fuse structures are arranged in a matrix, and each of the anti-fuse structure includes a top conductive structure, a bottom conductive structure, and a dielectric film disposed between the top conductive structure and the bottom conductive structure. The anti-fuse structure has an hourglass shape. The top metal plates are disposed on the top conductive structures. The bottom metal plates are disposed on the bottom conductive structures.
Claims10
A method of forming the electrical fuse matrix, comprising:
- forming a plurality of poly-silicon cylinders on a plurality of bottom metal plates;
- performing thermal oxidation on the poly-silicon cylinders such that a first silicon oxide layer is formed to surround the poly-silicon cylinders, wherein a plurality of trenches are formed between the poly-silicon cylinders;
- removing the poly-silicon cylinders to form a plurality of holes;
- forming a plurality of anti-fuse structures in the trenches and the holes;
- and
- forming a plurality of top metal plates on the anti-fuse structures.
Dependencies are inferred from the claim text.