Back to results
US 2022/0102271 A1Published application
Tunable resistance thin film resistor for integrated circuits
AssigneeIntel Corporation
InventorsChieh-Jen Ku, Bernhard Sell, Pei-Hua Wang
Life of this patent
Estimating the term…
Abstract
Tunable resistance thin film resistors for integrated circuits, related systems, and methods of fabrication are disclosed. Such tunable resistance thin film resistors include electrodes coupled to a resistive thin film that includes a base metal oxide and a second metal element. The resistors are tunable based on the concentration of the second metal element in the composition of the resistive thin film.
Claims20
An integrated circuit structure comprising
- a plurality of transistors within a device layer;
- one or more levels of metallization coupled to at least one of the transistors;
- and
- a resistor comprising first and second electrodes and a resistive thin film coupled to the first and second electrodes, the resistive thin film comprising indium, oxygen, and a second metal element.
1 more element
A system comprising
- a power supply;
- and
- an analog integrated circuit structure coupled to the power supply, the analog integrated circuit structure comprising a plurality of transistors within a device layer, a plurality of first resistors comprising a first resistive thin film, and a plurality of second resistors comprising a second resistive thin film, the first resistive thin film comprising indium, oxygen, and a second metal element.
A method of forming an integrated circuit structure comprising:
- forming a resistive thin film over a first dielectric layer, wherein the first dielectric layer is over a plurality of metallization levels and a device layer, the resistive thin film comprising indium, oxygen, and a second metal element;
- patterning the resistive thin film to form one or more resistive thin film elements;
- disposing a second dielectric layer over the resistive thin film elements;
- and
- coupling at least one of the resistive thin film elements to corresponding first and second electrodes.
2 more elements
Dependencies are inferred from the claim text.