Circuits employing a back side-front side connection structure for coupling back side routing to front side routing, and related complementary metal oxide semiconductor (cmos) circuits and methods

A method of fabricating a circuit, comprising:

• providing a substrate;
• forming a semiconductor device on the substrate, the semiconductor device comprising a front side and a back side disposed adjacent to the substrate;
• forming a metallization structure adjacent to the front side of the semiconductor device, the metallization structure comprising a front side metal line;
• forming a back side metal line adjacent on the back side of the semiconductor device;
• coupling the back side metal line to the semiconductor device;
• and
• forming a back side-front side connection structure coupling the back side metal line to the front side metal line.

The method of 14, wherein:

• forming the semiconductor device on the substrate comprises forming a field-effect transistor (FET) circuit, comprising:
• forming a conduction channel disposed above the substrate;
• forming a source disposed in a first end portion of the conduction channel;
• forming a drain disposed in a second end portion of the conduction channel opposite the first end portion;
• and
• forming a gate disposed above at least a portion of the conduction channel and between the first end portion and the second end portion of the conduction channel;
• and
• the back side metal line is in contact with one of the source, the drain, and the gate of the FET circuit.

A complementary metal-oxide semiconductor (CMOS) circuit, comprising:

• a positive (P)-type (P-type) field-effect transistor (FET) (PFET);
• a negative (N)-type (N-type) FET (NFET);
• a metallization structure disposed adjacent to a front side of at least one of the PFET and the NFET, the metallization structure comprising a front side metal line;
• a back side metal line disposed adjacent to a back side of at least one of the NFET and the PFET, the back side metal line coupled to at least one of the NFET and the PFET;
• and
• a back side-front side connection structure coupling the back side metal line to the front side metal line.