Through-hole sealing structure and sealing method, and transfer substrate for sealing through-hole
AssigneeTanaka Kikinzoku Kogyo K.K.
InventorsToshinori OGASHIWA, Yuya SASAKI, Masayuki MIYAIRI
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AssigneeTanaka Kikinzoku Kogyo K.K.
InventorsToshinori OGASHIWA, Yuya SASAKI, Masayuki MIYAIRI
Estimating the term…
A sealing structure including: a set of base members forming a sealed space; a through-hole which is formed in at least one of the base members, and communicates with the sealed space; and a sealing member that seals the through-hole. An underlying metal film including a bulk-like metal such as gold is provided on a surface of the base member provided with the through-hole. The sealing member seals the through-hole while being bonded to the underlying metal film, and includes: a sealing material which is bonded to the underlying metal film, and includes a compressed product of a metal powder of gold or the like, the metal powder having a purity of 99.9% by mass or more; and a lid-like metal film which is bonded to the sealing material, and includes a bulk-like metal such as gold. Further, the sealing material includes: an outer periphery-side densified region being in contact with an underlying metal film; and a center-side porous region being in contact with the through-hole. The densified region has a porosity of 10% or less in terms of an area ratio at any cross-section.
A sealing structure comprising:
Dependencies are inferred from the claim text.